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Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies
by
Kenichi
Takahata
File Type :Online
Number of Pages :226
Description
This book focuses on the latest development of devices and fabrication
processes in the field of extremely miniaturized electromechanical systems. The
book offers new knowledge and insight into design, fabrication, and packaging,
as well as solutions in these aspects for targeted applications, aiming to
support scientists, engineers and academic trainees who are engaged in relevant
research.
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