Rochester Institute of Technology
Microelectronic Engineering                                   September 13, 2017
Dr. Lynn Fuller

MCEE 550 CMOS IC Processing 
 
Lesson
Date
Discussion Topic
Lecture Document
Presentation, Excel,
Homework
No.

   
 References or Video
 
1.

8/29

Factory Orientation 
out_550.pdf
CMOS_Factory.ppt
REVIEW.pdf
Factory Presentation
REVIEW_Presentation
Lab Notebook Example
HW on Factory Presentation
Read all documents
2.

8/31

Intro to Mesa
 MESA.pdf
MESAHELP.pdf
MESA Presentation
Query Presentation
PROCESS.pdf
HW on MESA
Read all documents
 
       
3.
9/5
RIT Submicron CMOS Process
 SubCmos2014.pdf
 Sub-CMOS Presentation
 
4.
9/7
RIT Submicron CMOS Process
 SubCmos2014.pdf
 PlasmaEtch.wmv  
 
       
5.
9/12
 RIT Submicron CMOS Process
SubCmos2014.pdf
  HW on Sub-CMOS
6.
9/14
TQM, SPC and Process Capability Analysis
TQM.pdf
 TQM Presentation
HW TQM
 
       
7.
9/19
Adv MOSFET Basics
ADV_MOSFET_Basics.pdf
 Adv MOS Basics Presentation
HW on Basics
8.
9/21
Advanced CMOS Technology Parts 1 & 2
ADV_CMOS_Part1.pdf
 Adv CMOS Part 1 Presentation
 
 
       
9.
9/26
Advanced CMOS Technology Parts 1 & 2
ADV_CMOS_Part1.pdf
  HW on Part 1 & 2
10.
9/28
Advanced CMOS Technology Part 3
ADV_CMOS_Part2.pdf
  HW on Part 3
 
       
11.
9/27
ASML Stepper
ALIGN ASML.pdf
 ALIGN ASML Presentation
HW on ASML
12.
9/29
Ion Implant
implant.ppt
 Implant Presentation
HW on Implant
 
       
13.
10/3
RIT's Advanced CMOS Process Integration
AdvCmosProcessIntegration.pdf
   
14.
10/5
 RIT's Advanced CMOS Process Integration
 AdvCmosProcessIntegration.pdf
  HW Adv-CMOS
 
       

10/10
No Class



15.
10/12
RIT's Advanced CMOS Process Integration AdvCmosProcessIntegration.pdf







16.
10/17
Testing Device Problem Analysis
Device-Problem-Analysis.pdf
  HW none
17.



10/19
Testing
cmostest.ppt
TestResults.ppt
test_dig.ppt
Test Manual
CMOS TestingJohnGalt1.pdf
NMOS_TEST_DATA.xls
PMOS_TEST_DATA.xls
  HW TBA
 
       
18.
10/24
Introduction to SPICE
Intro_to_LTSPICE.pdf
MODELS for LTSPICE
 Intro to LTSPICE
Intro to LTSPICE.wmv
Other SPICE Documents
HW on Intro to LTSPICE
19.
10/26
Introduction to VLSI
IntroVLSI.pdf
 
 
       
20.
10/31
Introduction to VLSI
IntroVLSI.pdf
  HW on Intro to VLSI
21.
11/2
VLSI CAD
VLSI-CAD.pdf
  HW on VLSI CAD
 
       
22.

11/7
Microcontrollers
Microcontrollers.htm
 Arduino Sensor.wmv  HW None
 23.
11/9
 Introduction to Semiconductor Memory
SemiconductorMemoryIntro

 
 
   
   
24.
11/14
Introduction to Semiconductor Memory
SemiconductorMemoryIntro

 
 25.
11/16
SRAM
 SRAM.pdf    
 
       
26.
11/22
No Classes

 
 

11/24
Thanksgiving Break

   
 
       
27.
11/28
 DRAM and EEPROM
DRAM.pdf
EEPROM_Flash.pdf

   
28.
11/30
Wet Etch / Plasma Etch
 wet_etch.pdf    
 
       
29.
12/5
Interconnect
Interconnect.pdf


30.
12/7
Particle Count Studies par count.pdf







31.

Final Exam or Presentation of Process Improvement Projects
Factory Projects.pdf
 IEEE Format for Paper
 PowerPoint with Notes