ENSC495/851: Introduction to Microelectronic Fabrication
Notes and Labs Downloads 2016-1 (Spring)

All course outlines, notes, lab notes, and related files can be downloaded in PDF form
Downloads are restricted to ENSC 495/851 course students.

NOTE: New notes will be available about 3 pm on the day of class.

Course Notes & Outlines

File Information Status File Date Size (K)
Course Outline Spring 2016 Current PDF notes Jan. 5, 2016 28K
Week 1 (Lesson 1) - microfabrication, clean rooms and Si crystals, wafers (revised)
pg 31 revised
New PDF notes Feb. 11, 2016 10,579K
Week 2 (Lesson 2) silicon wafer growth & oxidation process
revised pg 44
New PDF notes Mar. 29, 2016 9,662K
Week 3 Notes (Lesson 3) Photolithography: resists, coating and mask aligners Current PDF notes Jan. 19, 2016 3,663K
Week 4 Notes (Lesson 4): Resist exposure/development and advance lithography Current PDF notes Jan. 26, 2016 5,003K
Week 5 Notes (Lesson 5): Etching intro - wet etching of oxide
Current PDF notes Feb.  2, 2016 4,858K
Week 6 Notes (Lesson 6): Diffusion and doping (revised)
Current PDF notes Feb. 3, 2016
8,924K
Week 7 Notes (Lesson 7): Ion implantation, Etching Si, Al (revised)
pg 3 revised
New PDF notes Mar. 26, 2016
6,148K
Week 8 Notes (Lesson 8): Vacuum Systems & Evaporation deposition
New PDF notes Mar.  1, 2016 4,744K
Week 9 Notes (Lesson 9): Sputter deposition, metal and intermetal layers
Current PDF notes Mar. 15, 2016 7,148K
Week 10 Notes (Lesson 10): Chemical Vapour Deposition (CVD)
New PDF notes Mar. 22, 2016 4,154K
Week 11 Notes (Lesson 11): CVD epitaxy and Plasma etching New PDF notes Mar. 29, 2016 6,277K
Week 12 Notes (Lesson 12): RIE etching, Packaging and Testing New PDF notes Mar. 29, 2016 10,356K
Week 13 Notes (Lesson 13): Process Integration & Simulation New PDF notes Apr. 5, 2016 4,300K



Page maintained by: Prof. Glenn Chapman
Last updated Apr. 5, 2016