Introduction to Microelectronic Fabrication
This lecture 
note provides an introduction to the theoretical background and 
application of each major IC fabrication processes: eg. oxidation, doping, 
depositions, photolithography and etching. The prerequisites are the students 
need are an understanding of basic transistor and diode operation. Topics 
covered includes: Clean Room Technology Silicon Wafer Production, 
Thermal Oxidation, Lithography, Advanced Lithography, Etching , Diffusion 
Processes and Ion Implantation, Thin Film Deposition, Packaging, Yields, 
Processing Silicon Foundries, CMOS and Bipolar Process Integration in practice, 
Photolithography: resists, coating and mask aligners, CVD epitaxy and Plasma 
etching.
Author(s): Prof. Glenn Chapman
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