Notes for Microelectronics Fabrication
This note covers the following topics:
Semiconductor and Solid State Physics, Crystal Structure and Growth, Defects in
Semiconductors and Internal Gettering, Silicon Dioxide and Thermal Oxidation,
Current-Voltage Analysis, Thickness Measurement, Ultra Thin Oxides, Impurity
Diffusion, Sheet Resistance and Diffusion Profiles, Electrical Characteristics
of pn-Junctions, Atomic Processes of Diffusion, Ion Implantation, Implanted and
Diffused Profiles.
Author(s): David R. Evans
242 Pages