Electronics Engineering BooksMicroelectronics Books

Introduction to Microelectronic Fabrication

Introduction to Microelectronic Fabrication

Introduction to Microelectronic Fabrication

This lecture note provides an introduction to the theoretical background and application of each major IC fabrication processes: eg. oxidation, doping, depositions, photolithography and etching. The prerequisites are the students need are an understanding of basic transistor and diode operation. Topics covered includes: Clean Room Technology Silicon Wafer Production, Thermal Oxidation, Lithography, Advanced Lithography, Etching , Diffusion Processes and Ion Implantation, Thin Film Deposition, Packaging, Yields, Processing Silicon Foundries, CMOS and Bipolar Process Integration in practice, Photolithography: resists, coating and mask aligners, CVD epitaxy and Plasma etching.

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Microelectronic Devices and Circuits

Microelectronic Devices and Circuits

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