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Introduction to Microelectronic Fabrication Processes

Introduction to Microelectronic Fabrication Processes

Introduction to Microelectronic Fabrication Processes

The target audience of this note is undergraduate chemical engineering and electronics and communication engineering students. The focus will be on the various modules relevant for chip manufacturing. Topics covered includes: Lithography, Depostion Techniques, Removal Techniques, FEOL, Diffusion, Ion Implantation, Oxidation, , process Integration, Testing, Yield, Tools and Techniques.

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